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Modification of samples using the FIB (focused ion beam) is a very useful technique in many areas of materials science. FIB technology was achieved after the advent and development of LMIS (liquid metal ions sources) providing well controlled ion beams with beam diameters and accurate beam deflection in the nano- and micrometer scale. Here we present some experiments using a Ga+ FIB source together with a field emission gun scanning electron microscope (FEG-SEM) in a dual beam platform. Using this dual beam platform, cross section studies and micro-sample preparation for transmission electron microscopy have been performed in metals, steels, semiconductors and insulating materials. Another area of interest is the development of standard samples for scanning electron, transmission electron and atomic force microcopies. Also we show the applicability of FIB in the fabrication of nanodevices for scientific and technological development. In particular,slight modifications are created in single layer graphite (graphene) structures and micro-Raman spectroscopy is used to track such changes in the structure of the material. This approach provides information about the performance and damage caused by FIB technique for tailoring nanostructures on graphene samples for nanodevice applications. In conclusion, we will present research results in materials science currently carried out using the dual beam platform installed at the Laboratory of Microscopy in the National Institute of Metrology of Brazil (Inmetro).

References:
[1] B. S Archanjo et. al.; Ion beam nanopatterning and micro-Raman spectroscopy analysis on HOPG for testing FIB performance, Ultramicroscopy 111, 1338  (2011)
[2] M. M. Lucchese, F. Stavale, E. H. Martins Ferreira, C. Vilani, M. V. O. Moutinho,R. B. Capaz, C. A. Achete, A. Jorio, Carbon 48, 1592 (2010).

O seminário será proferido em português